CARM 2G : model based design, analysis and initialization of Twinscan servo controllers

R.R.H. Schiffelers, C. Huët, van, N. Gidalov, W. Alberts, J.P.M. Voeten, B.D. Theelen, J. Ven, W. Tabingh Suermondt

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 2012
Eventconference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21 -
Duration: 21 Jun 201221 Jun 2012

Conference

Conferenceconference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21
Period21/06/1221/06/12
Other13th ASML Technology Conference

Bibliographical note

Proceedings of the 13th ASML Technology Conference, 21 June 2012, Veldhoven, The Netherlands

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