CARM 2G : model based design, analysis and initialization of Twinscan servo controllers

R.R.H. Schiffelers, C. Huët, van, N. Gidalov, W. Alberts, J.P.M. Voeten, B.D. Theelen, J. Ven, W. Tabingh Suermondt

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 2012
Eventconference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21 -
Duration: 21 Jun 201221 Jun 2012

Conference

Conferenceconference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21
Period21/06/1221/06/12
Other13th ASML Technology Conference

Bibliographical note

Proceedings of the 13th ASML Technology Conference, 21 June 2012, Veldhoven, The Netherlands

Cite this

Schiffelers, R. R. H., Huët, van, C., Gidalov, N., Alberts, W., Voeten, J. P. M., Theelen, B. D., ... Tabingh Suermondt, W. (2012). CARM 2G : model based design, analysis and initialization of Twinscan servo controllers. Poster session presented at conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21, .
Schiffelers, R.R.H. ; Huët, van, C. ; Gidalov, N. ; Alberts, W. ; Voeten, J.P.M. ; Theelen, B.D. ; Ven, J. ; Tabingh Suermondt, W. / CARM 2G : model based design, analysis and initialization of Twinscan servo controllers. Poster session presented at conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21, .
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title = "CARM 2G : model based design, analysis and initialization of Twinscan servo controllers",
author = "R.R.H. Schiffelers and {Hu{\"e}t, van}, C. and N. Gidalov and W. Alberts and J.P.M. Voeten and B.D. Theelen and J. Ven and {Tabingh Suermondt}, W.",
note = "Proceedings of the 13th ASML Technology Conference, 21 June 2012, Veldhoven, The Netherlands; conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21 ; Conference date: 21-06-2012 Through 21-06-2012",
year = "2012",
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Schiffelers, RRH, Huët, van, C, Gidalov, N, Alberts, W, Voeten, JPM, Theelen, BD, Ven, J & Tabingh Suermondt, W 2012, 'CARM 2G : model based design, analysis and initialization of Twinscan servo controllers', conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21, 21/06/12 - 21/06/12.

CARM 2G : model based design, analysis and initialization of Twinscan servo controllers. / Schiffelers, R.R.H.; Huët, van, C.; Gidalov, N.; Alberts, W.; Voeten, J.P.M.; Theelen, B.D.; Ven, J.; Tabingh Suermondt, W.

2012. Poster session presented at conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21, .

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - CARM 2G : model based design, analysis and initialization of Twinscan servo controllers

AU - Schiffelers, R.R.H.

AU - Huët, van, C.

AU - Gidalov, N.

AU - Alberts, W.

AU - Voeten, J.P.M.

AU - Theelen, B.D.

AU - Ven, J.

AU - Tabingh Suermondt, W.

N1 - Proceedings of the 13th ASML Technology Conference, 21 June 2012, Veldhoven, The Netherlands

PY - 2012

Y1 - 2012

M3 - Poster

ER -

Schiffelers RRH, Huët, van C, Gidalov N, Alberts W, Voeten JPM, Theelen BD et al. CARM 2G : model based design, analysis and initialization of Twinscan servo controllers. 2012. Poster session presented at conference; 13th ASML Technology Conference; 2012-06-21; 2012-06-21, .