Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet

G. Dinescu; E. Aldea; P. Boieriu; G. Musa; A. Andrei; M. Dinescu; G.J.H. Brussaard; R.J. Severens; M.C.M. Sanden, van de; D.C. Schram

doi:10.1016/S0168-583X%2896%2900531-9

Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet

G. Dinescu, E. Aldea, P. Boieriu, G. Musa, A. Andrei, M. Dinescu, G.J.H. Brussaard, R.J. Severens, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Contribution to journal › Article › Academic › peer-review

18 Citations (Scopus)

159 Downloads (Pure)

Original language	English
Pages (from-to)	298-302
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	120
Issue number	1-4
DOIs	https://doi.org/10.1016/S0168-583X%2896%2900531-9 https://doi.org/10.1016/S0168-583X(96)00531-9
Publication status	Published - 1996

Access to Document

588587Final published version, 440 KB

Cite this

Dinescu, G., Aldea, E., Boieriu, P., Musa, G., Andrei, A., Dinescu, M., Brussaard, G. J. H., Severens, R. J., Sanden, van de, M. C. M., & Schram, D. C. (1996). Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet. Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 120(1-4), 298-302. https://doi.org/10.1016/S0168-583X%2896%2900531-9, https://doi.org/10.1016/S0168-583X(96)00531-9

@article{b79ace3b40af4042bd401cee27afc819,

title = "Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet",

author = "G. Dinescu and E. Aldea and P. Boieriu and G. Musa and A. Andrei and M. Dinescu and G.J.H. Brussaard and R.J. Severens and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1996",

doi = "10.1016/S0168-583X%2896%2900531-9",

language = "English",

volume = "120",

pages = "298--302",

journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "1-4",

}

Dinescu, G, Aldea, E, Boieriu, P, Musa, G, Andrei, A, Dinescu, M, Brussaard, GJH, Severens, RJ, Sanden, van de, MCM & Schram, DC 1996, 'Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet', Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, vol. 120, no. 1-4, pp. 298-302. https://doi.org/10.1016/S0168-583X%2896%2900531-9, https://doi.org/10.1016/S0168-583X(96)00531-9

TY - JOUR

T1 - Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet

AU - Dinescu, G.

AU - Aldea, E.

AU - Boieriu, P.

AU - Musa, G.

AU - Andrei, A.

AU - Dinescu, M.

AU - Brussaard, G.J.H.

AU - Severens, R.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

U2 - 10.1016/S0168-583X%2896%2900531-9

DO - 10.1016/S0168-583X%2896%2900531-9

M3 - Article

SN - 0168-583X

VL - 120

SP - 298

EP - 302

JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -