Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet

G. Dinescu; E. Aldea; P. Boieriu; G. Musa; A. Andrei; M. Dinescu; G.J.H. Brussaard; R.J. Severens; M.C.M. Sanden, van de; D.C. Schram

doi:10.1016/S0168-583X(96)00531-9

Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet

G. Dinescu, E. Aldea, P. Boieriu, G. Musa, A. Andrei, M. Dinescu, G.J.H. Brussaard, R.J. Severens, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Contribution to journal › Article › Academic › peer-review

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Original language	English
Pages (from-to)	298-302
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	120
Issue number	1-4
DOIs	https://doi.org/10.1016/S0168-583X(96)00531-9
Publication status	Published - 1996

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Dinescu, G., Aldea, E., Boieriu, P., Musa, G., Andrei, A., Dinescu, M., Brussaard, G. J. H., Severens, R. J., Sanden, van de, M. C. M., & Schram, D. C. (1996). Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet. Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 120(1-4), 298-302. https://doi.org/10.1016/S0168-583X(96)00531-9

@article{b79ace3b40af4042bd401cee27afc819,

title = "Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet",

author = "G. Dinescu and E. Aldea and P. Boieriu and G. Musa and A. Andrei and M. Dinescu and G.J.H. Brussaard and R.J. Severens and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1996",

doi = "10.1016/S0168-583X(96)00531-9",

language = "English",

volume = "120",

pages = "298--302",

journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "1-4",

}

Dinescu, G, Aldea, E, Boieriu, P, Musa, G, Andrei, A, Dinescu, M, Brussaard, GJH, Severens, RJ, Sanden, van de, MCM & Schram, DC 1996, 'Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet', Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, vol. 120, no. 1-4, pp. 298-302. https://doi.org/10.1016/S0168-583X(96)00531-9

TY - JOUR

T1 - Carbon Nitride thin films prepared by a capacitively coupled RF plasma jet

AU - Dinescu, G.

AU - Aldea, E.

AU - Boieriu, P.

AU - Musa, G.

AU - Andrei, A.

AU - Dinescu, M.

AU - Brussaard, G.J.H.

AU - Severens, R.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

U2 - 10.1016/S0168-583X(96)00531-9

DO - 10.1016/S0168-583X(96)00531-9

M3 - Article

SN - 0168-583X

VL - 120

SP - 298

EP - 302

JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -