Calibration of displacement sensors with nanometer accuracy using a measuring laser

S.F.C.L. Wetzels, P.H.J. Schellekens

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageEnglish
    Title of host publicationProceedings 4th international IMEKO symposium on laser metrology for precision measurement and inspection in industry, Lyngby, Denmark, October 21-22, 1996 / Ed. L. DeChiffre
    EditorsL. DeChiffre
    Place of PublicationLyngby
    PublisherTechnical University of Denmark
    Publication statusPublished - 1996

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