Calibration of displacement sensors with nanometer accuracy using a measuring laser

S.F.C.L. Wetzels, P.H.J. Schellekens

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageEnglish
    Title of host publicationProceedings 4th international IMEKO symposium on laser metrology for precision measurement and inspection in industry, Lyngby, Denmark, October 21-22, 1996 / Ed. L. DeChiffre
    EditorsL. DeChiffre
    Place of PublicationLyngby
    PublisherTechnical University of Denmark
    Pages91-100
    Publication statusPublished - 1996

    Cite this

    Wetzels, S. F. C. L., & Schellekens, P. H. J. (1996). Calibration of displacement sensors with nanometer accuracy using a measuring laser. In L. DeChiffre (Ed.), Proceedings 4th international IMEKO symposium on laser metrology for precision measurement and inspection in industry, Lyngby, Denmark, October 21-22, 1996 / Ed. L. DeChiffre (pp. 91-100). Technical University of Denmark.