C2F4 absolute concentration measurements in pulsed CF4/H2 RF plasmas by means of IR-TDLAS

S. Stepanov; O. Gabriel; J. Meichsner

C2F4 absolute concentration measurements in pulsed CF4/H2 RF plasmas by means of IR-TDLAS

S. Stepanov
, O. Gabriel
, J. Meichsner

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	2nd International Workshop on Infrared Plasma Spectroscopy and 1st IPS Summer School, Greifswald, Germany, July 23 - July 27. 2007 : Book of Abstract
Pages	13
Number of pages	1
Publication status	Published - 2007

Cite this

@inproceedings{945cf13d7b364003b4c5ccb787d54bec,

title = "C2F4 absolute concentration measurements in pulsed CF4/H2 RF plasmas by means of IR-TDLAS",

author = "S. Stepanov and O. Gabriel and J. Meichsner",

year = "2007",

language = "English",

pages = "13",

booktitle = "2nd International Workshop on Infrared Plasma Spectroscopy and 1st IPS Summer School, Greifswald, Germany, July 23 - July 27. 2007 : Book of Abstract",

}

C2F4 absolute concentration measurements in pulsed CF4/H2 RF plasmas by means of IR-TDLAS. / Stepanov, S.; Gabriel, O.; Meichsner, J.
2nd International Workshop on Infrared Plasma Spectroscopy and 1st IPS Summer School, Greifswald, Germany, July 23 - July 27. 2007 : Book of Abstract. 2007. p. 13.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - C2F4 absolute concentration measurements in pulsed CF4/H2 RF plasmas by means of IR-TDLAS

AU - Stepanov, S.

AU - Gabriel, O.

AU - Meichsner, J.

PY - 2007

Y1 - 2007

M3 - Conference contribution

SP - 13

BT - 2nd International Workshop on Infrared Plasma Spectroscopy and 1st IPS Summer School, Greifswald, Germany, July 23 - July 27. 2007 : Book of Abstract

ER -