C2F4 absolute concentration measurements in pulsed CF4/H2 RF plasmas by means of IR-TDLAS

S. Stepanov, O. Gabriel, J. Meichsner

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publication2nd International Workshop on Infrared Plasma Spectroscopy and 1st IPS Summer School, Greifswald, Germany, July 23 - July 27. 2007 : Book of Abstract
Pages13
Number of pages1
Publication statusPublished - 2007

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