Buried heterostructures for deep UV lithography

V. Rustichelli, H.P.M.M. Ambrosius, P.J. van Veldhoven, R. Brenot (Supervisor), K.A. Williams

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	Proceedings of ECIO 2016
Number of pages	2
Publication status	Published - 2016
Event	18th European Conference on Integrated Optics (ECIO 2016) - Warsaw University of Technology, Warsaw, Poland Duration: 18 May 2016 → 20 May 2016 Conference number: 18 http://ecio2016.imio.pw.edu.pl/

Conference	18th European Conference on Integrated Optics (ECIO 2016)
Abbreviated title	ECIO 2016
Country/Territory	Poland
City	Warsaw
Period	18/05/16 → 20/05/16
Internet address	http://ecio2016.imio.pw.edu.pl/

Access to Document

@inproceedings{5146d0d92a82435e9adb038299008db0,

title = "Buried heterostructures for deep UV lithography",

author = "V. Rustichelli and H.P.M.M. Ambrosius and {van Veldhoven}, P.J. and R. Brenot and K.A. Williams",

year = "2016",

language = "English",

booktitle = "Proceedings of ECIO 2016",

note = "18th European Conference on Integrated Optics (ECIO 2016), ECIO 2016 ; Conference date: 18-05-2016 Through 20-05-2016",

url = "http://ecio2016.imio.pw.edu.pl/",

}

TY - GEN

T1 - Buried heterostructures for deep UV lithography

AU - Rustichelli, V.

AU - Ambrosius, H.P.M.M.

AU - van Veldhoven, P.J.

AU - Williams, K.A.

A2 - Brenot, R.

N1 - Conference code: 18

PY - 2016

Y1 - 2016

M3 - Conference contribution

BT - Proceedings of ECIO 2016

T2 - 18th European Conference on Integrated Optics (ECIO 2016)

Y2 - 18 May 2016 through 20 May 2016

ER -