Buried heterostructures for deep UV lithography

V. Rustichelli, H.P.M.M. Ambrosius, P.J. van Veldhoven, R. Brenot (Supervisor), K.A. Williams

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

51 Downloads (Pure)
Original languageEnglish
Title of host publicationProceedings of ECIO 2016
Number of pages2
Publication statusPublished - 2016
Event18th European Conference on Integrated Optics (ECIO 2016) - Warsaw University of Technology, Warsaw, Poland
Duration: 18 May 201620 May 2016
Conference number: 18
http://ecio2016.imio.pw.edu.pl/

Conference

Conference18th European Conference on Integrated Optics (ECIO 2016)
Abbreviated titleECIO 2016
CountryPoland
CityWarsaw
Period18/05/1620/05/16
Internet address

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