Abstract
Original language | English |
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Article number | 160141 |
Number of pages | 9 |
Journal | Applied Surface Science |
Volume | 665 |
DOIs | |
Publication status | Published - 30 Aug 2024 |
Funding
The authors thank Lam Research Corp. United States for supporting this work. A.J.M.M. and I.T acknowledge support from European Research Council (ERC No. 949202) under the European Union's Horizon 2020 research and innovation program. A.J.M.M. and M.J.M.M thank support from the Dutch Research Council (NWO, the Netherlands) through the Vidi project 18363. T.E.S. acknowledges funding from ANID (Agencia Nacional de Investigaci\u00F3n y Desarrollo, Chile) through FONDECYT 1231197 (Fondo Nacional de Desarrollo Cient\u00EDfico y Tecnol\u00F3gico, Chile). This research was partially supported by the supercomputing infrastructure of the NLHPC, Chile (ECM-02).
Funders | Funder number |
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Lam Research Corporation | |
National Agency for Research and Development | |
European Union's Horizon 2020 - Research and Innovation Framework Programme | |
H2020 European Research Council | 949202 |
Nederlandse Organisatie voor Wetenschappelijk Onderzoek | 18363 |
Keywords
- Area-selective deposition
- Atomic layer deposition
- Fourier-transform infrared spectroscopy
- Small molecule inhibitors
- Spectroscopic ellipsometry
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Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation
Yu, P. (Creator), Merkx, M. J. M. (Creator), Tezsevin, I. (Creator), Lemaire, P. C. (Creator), Hausmann, D. M. (Creator), Sandoval, T. E. (Creator), Kessels, W. M. M. (Creator) & Mackus, A. J. M. (Creator), 4TU.Centre for Research Data, 2 May 2024
DOI: 10.4121/c357264b-f395-4409-bedc-328f45f6e6ac, https://data.4tu.nl/datasets/c357264b-f395-4409-bedc-328f45f6e6ac and 2 more links, https://data.4tu.nl/datasets/c357264b-f395-4409-bedc-328f45f6e6ac/1, https://data.4tu.nl/datasets/c357264b-f395-4409-bedc-328f45f6e6ac/2 (show fewer)
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