Beyond decentralized wafer/reticle stage control design: a double-Youla approach for enhancing synchronized motion

E. Evers (Corresponding author), Marc van de Wal, Tom Oomen

Control Systems Technology

Research output: Contribution to journal › Article › Academic › peer-review

20 Citations (Scopus)

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20 Citations - based on content available in repository [source: Scopus]
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2017
Synchronizing decentralized control loops for overall performance enhancement : a Youla framework applied to a wafer scanner
Evers, E., van de Wal, M. M. J. & Oomen, T. A. E., 18 Oct 2017, In: IFAC-PapersOnLine. 50, 1, p. 10845-10850 6 p.
Research output: Contribution to journal › Conference article › peer-review

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6 Citations (Scopus)

189 Downloads (Pure)