Beam pulsing device for use in charged-particle microscopy

E.R. Kieft (Inventor), F.B. Kiewiet (Inventor), A. Lassise (Inventor), O.J. Luiten (Inventor), P.H.A. Mutsaers (Inventor), E.J.D. Vredenbregt (Inventor), A. Henstra (Inventor)

Research output: PatentPatent publication

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Physics & Astronomy