Batch-to-batch rational feedforward control: from iterative learning to identification approaches, with application to a wafer stage

L. Blanken, F.A.J. Boeren, D.J.H. Bruijnen, T.A.E. Oomen

Research output: Contribution to journalArticleAcademicpeer-review

41 Citations (Scopus)
9 Downloads (Pure)

Abstract

Feedforward control enables high performance for industrial motion systems that perform nonrepeating motion tasks. Recently, learning techniques have been proposed that improve both performance and flexibility to nonrepeating tasks in a batch-To-batch fashion by using a rational parameterization in feedforward control. This paper aims to unify these approaches through a single framework that provides transparent connections and clear differences between the alternatives. Experimental results on an industrial motion system confirm the theoretical findings and illustrate benefits of rational feedforward tuning in motion systems, including preactuation and postactuation.

Original languageEnglish
Article number7736097
Pages (from-to)826-837
Number of pages12
JournalIEEE/ASME Transactions on Mechatronics
Volume22
Issue number2
DOIs
Publication statusPublished - 1 Apr 2017

Keywords

  • Feedforward control
  • learning control
  • motion control

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