Batch size optimisation of a furnace and pre clean area by using dynamic simulation

H.J.A. Rulkens, E.J.J. Campen, van, J. Herk, J.E. Rooda

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageEnglish
    Title of host publicationSemiconductor manufacturing : meeting the challenges of the global marketplace : ASMC 98 proceedings / 1998 IEEE/SEMI advanced semiconductor manufacturing conference and workshop, September 23-25, 1998, Boston, Massachusetts
    Place of PublicationMountain View, California
    ISBN (Print)0-7803-4380-8
    Publication statusPublished - 1998

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