Automated local probe oxidation: from nanometer to millimeter scale

Oxidative scanning probe nanolithog. and nanochem. has recently been introduced as a versatile nanopatterning tool for the prodn. of functional nanometer-sized devices with sub 20 nm resoln. Here we would like to introduce the application of automated local probe oxidn. By using an automated (single tip) AFM with programmable sample stage we can copy oxidized patterns on large areas of the substrate. By creating an array of hundreds of patterns we can functionalize millimeter-sized substrates. As initial expt. we have attached cationic colloidal gold nanoparticles on the oxidized patterns. The resulting array of gold nanoparticles was studied using SEM and X-ray photoelectron microscopy. We are currently working on combining automation, sequential oxidn. and functionalization schemes in order to prep. large scale multi-component patterns.