Atomic layer deposition of strontium titanate : from material control to nanoscale devices

V. Longo

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kessels, W.M.M. (Erwin), Promotor Roozeboom, Fred, Promotor Verheijen, Marcel A., Copromotor
Award date	27 Aug 2014
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-3660-3
DOIs	https://doi.org/10.6100/IR776341
Publication status	Published - 2014

Access to Document

@phdthesis{7a366737e22449bf8581c6e7d1a13d8d,

title = "Atomic layer deposition of strontium titanate : from material control to nanoscale devices",

author = "V. Longo",

year = "2014",

doi = "10.6100/IR776341",

language = "English",

isbn = "978-90-386-3660-3",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}