Atomic layer deposition of ruthenium films : properties and surface reactions

N. Leick-Marius

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kessels, W.M.M. (Erwin), Promotor Roozeboom, Fred, Promotor
Award date	3 Dec 2014
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-94-6295-003-0
DOIs	https://doi.org/10.6100/IR782932
Publication status	Published - 2014

Access to Document

@phdthesis{8ddebcea59124b7486648e7cdb84cb0f,

title = "Atomic layer deposition of ruthenium films : properties and surface reactions",

author = "N. Leick-Marius",

year = "2014",

doi = "10.6100/IR782932",

language = "English",

isbn = "978-94-6295-003-0",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}