Atomic layer deposition of ruthenium films : properties and surface reactions

N. Leick-Marius

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • Kessels, W.M.M. (Erwin), Promotor
  • Roozeboom, Fred, Promotor
Award date3 Dec 2014
Place of PublicationEindhoven
Publisher
Print ISBNs978-94-6295-003-0
DOIs
Publication statusPublished - 2014

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