TY - JOUR
T1 - Atomic layer deposition of Nb-doped TiO2: dopant incorporation and effect of annealing
AU - Berghuis, Willem-Jan H.
AU - Melskens, Jimmy
AU - Macco, Bart
AU - Basuvalingam, Saravana Balaji
AU - Verheijen, Marcel A.
AU - Kessels, W.M.M. (Erwin)
PY - 2020/3/1
Y1 - 2020/3/1
N2 - Transparent conductive oxides form an important group of materials that combine high conductivity with high transparency. In this context, the authors designed an atomic layer deposition process for Nb-doped TiO2. The presented process enables accurate control over both the position and concentration of the Nb dopants. The as-deposited films become crystalline (brookite) and low resistive (4.3 × 10−3 Ω cm) upon a postdeposition anneal with temperatures as low as 300 °C. Variations in annealing ambient and temperature yielded resistivity changes over four orders of magnitude and significant changes in the sub-bandgap absorption of light. Next to doping, annealing is therefore shown to be a powerful tool in controlling electrical and optical properties of TiO2:Nb.
AB - Transparent conductive oxides form an important group of materials that combine high conductivity with high transparency. In this context, the authors designed an atomic layer deposition process for Nb-doped TiO2. The presented process enables accurate control over both the position and concentration of the Nb dopants. The as-deposited films become crystalline (brookite) and low resistive (4.3 × 10−3 Ω cm) upon a postdeposition anneal with temperatures as low as 300 °C. Variations in annealing ambient and temperature yielded resistivity changes over four orders of magnitude and significant changes in the sub-bandgap absorption of light. Next to doping, annealing is therefore shown to be a powerful tool in controlling electrical and optical properties of TiO2:Nb.
U2 - 10.1116/1.5134743
DO - 10.1116/1.5134743
M3 - Article
VL - 38
JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films
JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films
SN - 0734-2101
IS - 2
M1 - 022408
ER -