Atomic layer deposition of hafnium oxide on germanium substrates

Annelies Delabie, Riikka L. Puurunen, Bert Brijs, Matty Caymax, Thierry Conard, Bart Onsia, Olivier Richard, Wilfried Vandervorst, Chao Zhao, Marc M. Heyns, Marc Meuris, Minna M. Viitanen, Hidde H. Brongersma, Marco De Ridder, Lyudmila V. Goncharova, Eric Garfunkel, Torgny Gustafsson, Wilman Tsai

    Research output: Contribution to journalArticleAcademicpeer-review

    99 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Atomic layer deposition of hafnium oxide on germanium substrates'. Together they form a unique fingerprint.

    Physics & Astronomy