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Atomic layer deposition of GdF3thin films

  • Elisa Atosuo (Corresponding author)
  • , Kenichiro Mizohata
  • , Miika Mattinen
  • , Miia Mäntymäki
  • , Marko Vehkamäki
  • , Markku Leskelä
  • , Mikko Ritala

Research output: Contribution to journal › Article › Academic › peer-review

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322 Downloads (Pure)

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