Atomic layer deposition applications 6

J.W. Elam (Editor), A. Londergan (Editor), S. Gendt, De (Editor), S.F. Bent (Editor), O. Straten, van der (Editor), F. Roozeboom (Editor), A. Delabie (Editor)

Research output: Book/ReportBook editingAcademic

1 Citation (Scopus)

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Engineering & Materials Science