Atomic and molecular emission spectroscopy on an expanding argon/methane plasma

J.J. Beulens; C. Gastineau; N.T. Guerassimov; J. Koulidiati; D.C. Schram

doi:10.1007/BF01448735

Atomic and molecular emission spectroscopy on an expanding argon/methane plasma

J.J. Beulens, C. Gastineau, N.T. Guerassimov, J. Koulidiati, D.C. Schram

Plasma & Materials Processing

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Abstract

A supersonically expanding cascaded arc plasma in argon is analyzed experimentally by emission spectroscopy. The thermal cascaded arc plasma is allowed to expand through a conically shaped nozzle in the arc anode into the vacuum vessel. In the nozzle monomers (C/sub x/H/sub y/) are injected. The monomers are dissociated and ionized by the argon carrier plasma, and transported toward a substrate by means of the expansion. Emission spectroscopy is used to obtain temperatures and particle densities. By varying external parameters (e.g., arc power, gas flow rates) plasma parameters can be linked with film parameters (e.g., refractive index)

Original language	English
Pages (from-to)	15-42
Journal	Plasma Chemistry and Plasma Processing
Volume	14
Issue number	1
DOIs	https://doi.org/10.1007/BF01448735
Publication status	Published - 1994

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title = "Atomic and molecular emission spectroscopy on an expanding argon/methane plasma",

abstract = "A supersonically expanding cascaded arc plasma in argon is analyzed experimentally by emission spectroscopy. The thermal cascaded arc plasma is allowed to expand through a conically shaped nozzle in the arc anode into the vacuum vessel. In the nozzle monomers (C/sub x/H/sub y/) are injected. The monomers are dissociated and ionized by the argon carrier plasma, and transported toward a substrate by means of the expansion. Emission spectroscopy is used to obtain temperatures and particle densities. By varying external parameters (e.g., arc power, gas flow rates) plasma parameters can be linked with film parameters (e.g., refractive index)",

author = "J.J. Beulens and C. Gastineau and N.T. Guerassimov and J. Koulidiati and D.C. Schram",

year = "1994",

doi = "10.1007/BF01448735",

language = "English",

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T1 - Atomic and molecular emission spectroscopy on an expanding argon/methane plasma

AU - Beulens, J.J.

AU - Gastineau, C.

AU - Guerassimov, N.T.

AU - Koulidiati, J.

AU - Schram, D.C.

PY - 1994

Y1 - 1994

N2 - A supersonically expanding cascaded arc plasma in argon is analyzed experimentally by emission spectroscopy. The thermal cascaded arc plasma is allowed to expand through a conically shaped nozzle in the arc anode into the vacuum vessel. In the nozzle monomers (C/sub x/H/sub y/) are injected. The monomers are dissociated and ionized by the argon carrier plasma, and transported toward a substrate by means of the expansion. Emission spectroscopy is used to obtain temperatures and particle densities. By varying external parameters (e.g., arc power, gas flow rates) plasma parameters can be linked with film parameters (e.g., refractive index)

AB - A supersonically expanding cascaded arc plasma in argon is analyzed experimentally by emission spectroscopy. The thermal cascaded arc plasma is allowed to expand through a conically shaped nozzle in the arc anode into the vacuum vessel. In the nozzle monomers (C/sub x/H/sub y/) are injected. The monomers are dissociated and ionized by the argon carrier plasma, and transported toward a substrate by means of the expansion. Emission spectroscopy is used to obtain temperatures and particle densities. By varying external parameters (e.g., arc power, gas flow rates) plasma parameters can be linked with film parameters (e.g., refractive index)

U2 - 10.1007/BF01448735

DO - 10.1007/BF01448735

M3 - Article

SN - 0272-4324

VL - 14

SP - 15

EP - 42

JO - Plasma Chemistry and Plasma Processing

JF - Plasma Chemistry and Plasma Processing

IS - 1

ER -

Atomic and molecular emission spectroscopy on an expanding argon/methane plasma

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