Atmospheric pressure plasma vapour coatings

The dielectric barrier discharge (DBD) is recognized as a promising tool of thin films deposition on various substrates at atmospheric pressure. Emerging applications including encapsulation of flexible solar cells and flexible displays require large scale low costs production cif transparent uniform dense layers with low level of surface defects. Unfortunately, the common operational mode of the atmospheric pressure DBD is filamentary, resulting in strong spatial non-uniformity of plasma chemistry and affecting the quality of the deposited films. Sustaining of the filament-free non-thermal plasma over the large area substrate at atmospheric pressure remains a challenging task especially considering the discharge in ambient air.