Atmospheric-pressure plasma-enhanced spatial Atomic Layer Deposition: a spectroscopic investigation of reaction mechanisms

Maria Antonietta Mione

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Roozeboom, Fred, Promotor Kessels, W.M.M. (Erwin), Promotor Poodt, Paul W.G., Copromotor
Award date	20 Oct 2021
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Print ISBNs	978-90-386-5354-9
Publication status	Published - 20 Oct 2021

Proefschrift.

Promotion : time and place

@phdthesis{47da8b921d8241ab8119b50e346a66b6,

title = "Atmospheric-pressure plasma-enhanced spatial Atomic Layer Deposition: a spectroscopic investigation of reaction mechanisms",

author = "Mione, {Maria Antonietta}",

note = "Proefschrift.",

year = "2021",

month = oct,

day = "20",

language = "English",

isbn = "978-90-386-5354-9",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}