Atmospheric pressure plasma enhanced spatial ALD of silver

F.J. Bruele, van den, M. Smets, A. Illiberi, Y.L.M. Creijghton, P. Buskens, F. Roozeboom, P. Poodt

Research output: Contribution to journal › Article › Academic › peer-review

43 Citations (Scopus)
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Earth and Planetary Sciences