Atmospheric pressure plasma enhanced chemical vapour deposition of silica : understanding the role of the local deposition rate in the surface and film morphology

A. Meshkova

Atmospheric pressure plasma enhanced chemical vapour deposition of silica : understanding the role of the local deposition rate in the surface and film morphology

A. Meshkova

Plasma & Materials Processing

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Abstract

Understanding flexible moisture barrier layers

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	van de Sanden, M.C.M. (Richard), Promotor de Vries, Hindrik W., Copromotor, External person
Award date	4 Dec 2018
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-4652-7
Publication status	Published - 4 Dec 2018

Bibliographical note

Proefschrift

Keywords

11:00h, Auditorium, Zaal 4

Promotion : time and place

11:00h, Auditorium, Senaatszaal

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20181204_MeshkovaFinal published version, 3.26 MB

Cite this

@phdthesis{c6f2079e7f2948fc88a4f842dee99a02,

title = "Atmospheric pressure plasma enhanced chemical vapour deposition of silica : understanding the role of the local deposition rate in the surface and film morphology",

abstract = "Understanding flexible moisture barrier layers",

keywords = "11:00h, Auditorium, Zaal 4",

author = "A. Meshkova",

note = "Proefschrift",

year = "2018",

month = dec,

day = "4",

language = "English",

isbn = "978-90-386-4652-7",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}

TY - THES

T1 - Atmospheric pressure plasma enhanced chemical vapour deposition of silica : understanding the role of the local deposition rate in the surface and film morphology

AU - Meshkova, A.

N1 - Proefschrift

PY - 2018/12/4

Y1 - 2018/12/4

N2 - Understanding flexible moisture barrier layers

AB - Understanding flexible moisture barrier layers

KW - 11:00h, Auditorium, Zaal 4

M3 - Phd Thesis 1 (Research TU/e / Graduation TU/e)

SN - 978-90-386-4652-7

PB - Technische Universiteit Eindhoven

CY - Eindhoven

ER -

Atmospheric pressure plasma enhanced chemical vapour deposition of silica : understanding the role of the local deposition rate in the surface and film morphology

Abstract

Bibliographical note

Keywords

Promotion : time and place

Access to Document

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Cite this