Atmospheric pressure plasma enhanced chemical vapour deposition of silica : understanding the role of the local deposition rate in the surface and film morphology

A. Meshkova

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Abstract

Understanding flexible moisture barrier layers
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • van de Sanden, M.C.M. (Richard), Promotor
  • de Vries, Hindrik W., Copromotor, External person
Award date4 Dec 2018
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4652-7
Publication statusPublished - 4 Dec 2018

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Keywords

  • 11:00h, Auditorium, Zaal 4

Promotion : time and place

  • 11:00h, Auditorium, Senaatszaal

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