Atmospheric pressure-plasma enhanced chemical vapour deposition of silica : characterisation and control of porosity in multi-layer encapsulation films

F.M. Elam

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

50 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • van de Sanden, M.C.M. (Richard), Promotor
  • de Vries, H.W., Copromotor
Award date16 Jan 2018
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4417-2
Publication statusPublished - 16 Jan 2018

Bibliographical note

Proefschrift

Promotion : time and place

  • 16:00h, Auditorium, Senaatszaal

Cite this

@phdthesis{a7cecb3bb0cb44bc927e5f14916891eb,
title = "Atmospheric pressure-plasma enhanced chemical vapour deposition of silica : characterisation and control of porosity in multi-layer encapsulation films",
author = "F.M. Elam",
note = "Proefschrift",
year = "2018",
month = "1",
day = "16",
language = "English",
isbn = "978-90-386-4417-2",
publisher = "Technische Universiteit Eindhoven",
school = "Department of Applied Physics",

}

Atmospheric pressure-plasma enhanced chemical vapour deposition of silica : characterisation and control of porosity in multi-layer encapsulation films. / Elam, F.M.

Eindhoven : Technische Universiteit Eindhoven, 2018. 154 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

TY - THES

T1 - Atmospheric pressure-plasma enhanced chemical vapour deposition of silica : characterisation and control of porosity in multi-layer encapsulation films

AU - Elam, F.M.

N1 - Proefschrift

PY - 2018/1/16

Y1 - 2018/1/16

M3 - Phd Thesis 1 (Research TU/e / Graduation TU/e)

SN - 978-90-386-4417-2

PB - Technische Universiteit Eindhoven

CY - Eindhoven

ER -