Atmospheric pressure-plasma enhanced chemical vapour deposition of silica : characterisation and control of porosity in multi-layer encapsulation films

F.M. Elam

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

101 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • van de Sanden, M.C.M. (Richard), Promotor
  • de Vries, Hindrik W., Copromotor, External person
Award date16 Jan 2018
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4417-2
Publication statusPublished - 16 Jan 2018

Bibliographical note

Proefschrift

Promotion : time and place

  • 16:00h, Auditorium, Senaatszaal

Cite this