Assessing the performance of two-dimensional dopant profiling techniques

N. Duhayon; P. Eyben; M. Fouchier; T. Clarysse; W. Vandervorst; D. Álvarez; S. Schoemann; M. Ciappa; M. Stangoni; W. Fichtner; P. Formanek; M. Kittler; V. Raineri; F. Giannazzo; D. Goghero; Y. Rosenwaks; R. Shikler; S. Saraf; S. Sadewasser; N. Barreau; T. Glatzel; M. Verheijen; S.A.M. Mentink; M. von Sprekelsen; T. Maltezopoulos; R. Wiesendanger; L. Hellemans

doi:10.1116/1.1638775

Assessing the performance of two-dimensional dopant profiling techniques

N. Duhayon
, P. Eyben
, M. Fouchier
, T. Clarysse
, W. Vandervorst
, D. Álvarez
, S. Schoemann
, M. Ciappa
, M. Stangoni
, W. Fichtner
, P. Formanek
, M. Kittler
, V. Raineri
, F. Giannazzo
, D. Goghero
, Y. Rosenwaks
, R. Shikler
, S. Saraf
, S. Sadewasser
, N. Barreau

T. Glatzel, M. Verheijen, S.A.M. Mentink, M. von Sprekelsen, T. Maltezopoulos, R. Wiesendanger, L. Hellemans

Research output: Contribution to journal › Article › Academic › peer-review

67 Citations (Scopus)

Abstract

The performance of two-dimensional dopant profiling techniques was studied. This study was carried out within the framework of a European project (HERCULAS), which is focused on the improvement of 2D-profiling tools. The practical organization of the round robin and the different samples that were exchanged was discussed. The results show that all the techniques succeeded in measuring the p- and n-type calibration samples.

Original language	English
Pages (from-to)	385-393
Number of pages	9
Journal	Journal of Vacuum Science and Technology B
Volume	22
Issue number	1
DOIs	https://doi.org/10.1116/1.1638775
Publication status	Published - 1 Jan 2004
Externally published	Yes

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Duhayon, N., Eyben, P., Fouchier, M., Clarysse, T., Vandervorst, W., Álvarez, D., Schoemann, S., Ciappa, M., Stangoni, M., Fichtner, W., Formanek, P., Kittler, M., Raineri, V., Giannazzo, F., Goghero, D., Rosenwaks, Y., Shikler, R., Saraf, S., Sadewasser, S., ... Hellemans, L. (2004). Assessing the performance of two-dimensional dopant profiling techniques. Journal of Vacuum Science and Technology B, 22(1), 385-393. https://doi.org/10.1116/1.1638775

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abstract = "The performance of two-dimensional dopant profiling techniques was studied. This study was carried out within the framework of a European project (HERCULAS), which is focused on the improvement of 2D-profiling tools. The practical organization of the round robin and the different samples that were exchanged was discussed. The results show that all the techniques succeeded in measuring the p- and n-type calibration samples.",

author = "N. Duhayon and P. Eyben and M. Fouchier and T. Clarysse and W. Vandervorst and D. {\'A}lvarez and S. Schoemann and M. Ciappa and M. Stangoni and W. Fichtner and P. Formanek and M. Kittler and V. Raineri and F. Giannazzo and D. Goghero and Y. Rosenwaks and R. Shikler and S. Saraf and S. Sadewasser and N. Barreau and T. Glatzel and M. Verheijen and S.A.M. Mentink and \{von Sprekelsen\}, M. and T. Maltezopoulos and R. Wiesendanger and L. Hellemans",

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Duhayon, N, Eyben, P, Fouchier, M, Clarysse, T, Vandervorst, W, Álvarez, D, Schoemann, S, Ciappa, M, Stangoni, M, Fichtner, W, Formanek, P, Kittler, M, Raineri, V, Giannazzo, F, Goghero, D, Rosenwaks, Y, Shikler, R, Saraf, S, Sadewasser, S, Barreau, N, Glatzel, T, Verheijen, M, Mentink, SAM, von Sprekelsen, M, Maltezopoulos, T, Wiesendanger, R & Hellemans, L 2004, 'Assessing the performance of two-dimensional dopant profiling techniques', Journal of Vacuum Science and Technology B, vol. 22, no. 1, pp. 385-393. https://doi.org/10.1116/1.1638775

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T1 - Assessing the performance of two-dimensional dopant profiling techniques

AU - Duhayon, N.

AU - Eyben, P.

AU - Fouchier, M.

AU - Clarysse, T.

AU - Vandervorst, W.

AU - Álvarez, D.

AU - Schoemann, S.

AU - Ciappa, M.

AU - Stangoni, M.

AU - Fichtner, W.

AU - Formanek, P.

AU - Kittler, M.

AU - Raineri, V.

AU - Giannazzo, F.

AU - Goghero, D.

AU - Rosenwaks, Y.

AU - Shikler, R.

AU - Saraf, S.

AU - Sadewasser, S.

AU - Barreau, N.

AU - Glatzel, T.

AU - Verheijen, M.

AU - Mentink, S.A.M.

AU - von Sprekelsen, M.

AU - Maltezopoulos, T.

AU - Wiesendanger, R.

AU - Hellemans, L.

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AB - The performance of two-dimensional dopant profiling techniques was studied. This study was carried out within the framework of a European project (HERCULAS), which is focused on the improvement of 2D-profiling tools. The practical organization of the round robin and the different samples that were exchanged was discussed. The results show that all the techniques succeeded in measuring the p- and n-type calibration samples.

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Assessing the performance of two-dimensional dopant profiling techniques

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