Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

Bart Koolmees (Inventor), J.P.M.B. (Hans) Vermeulen (Inventor)

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  • 2019

    Positioning device, magnetic support system and lithographic apparatus

    Koolmees, B. & Vermeulen, J. P. M. B., 18 Apr 2019, IPC No. G03F 7/20 (2006.01) , H01L 21/68 (2006.01) , H01F 6/04 (2006.01) , H02K 55/00 (2006.01) , F17C 13/08 (2006.01) , Patent No. WO2019072529, 24 Sept 2018, Priority date 11 Oct 2017

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