Content available in repository
Content available in repository
Abstract
The invention provides an assembly comprising a cryostat (6, 7, 8, 9) and a flat coil layer (3) of superconducting coils (2) for use with a magnetic levitation and/or acceleration motor system (1) of a lithographic apparatus. The cryostat comprises two insulation coverings (8, 9). The coil layer is arranged between the two coverings. The coverings each comprise an inner plate (10) configured to be cryocooled and an outer plate (11) parallel to the inner plate, and an insulation system with a vacuum layer (13) between the inner and outer plate. The insulation system of said covering comprises a layer of circular bodies (101), the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.
| Original language | English |
|---|---|
| Patent number | WO2019233698 |
| IPC | G03F 7/20 (2006.01) ,H02K 3/24 (2006.01) |
| Priority date | 5/06/18 |
| Filing date | 9/05/19 |
| Publication status | Published - 12 Dec 2019 |
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Positioning device, magnetic support system and lithographic apparatus
Koolmees, B. (Inventor) & Vermeulen, J. P. M. B. (Inventor), 18 Apr 2019, IPC No. G03F 7/20 (2006.01) , H01L 21/68 (2006.01) , H01F 6/04 (2006.01) , H02K 55/00 (2006.01) , F17C 13/08 (2006.01) , Patent No. WO2019072529, 24 Sept 2018, Priority date 11 Oct 2017Research output: Patent › Patent publication
Open AccessFile -
High stiffness fixation and thermal insulation in a superconducting planar motor
Koolmees, H. B. & Vermeulen, J. P. M. B., 1 Jan 2018, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. Riemer, O., Savio, E., Billington, D., Leach, R. K. & Phillips, D. (eds.). European Society for Precision Engineering and Nanotechnology, p. 191-192 2 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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The performance potential of superconducting linear and planar motors
Koolmees, H. B., De Bruyn, B. J. H., Vermeulen, J. P. M. B., Jansen, J. W. & Lomonova, E. A., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. Billington, D. & Philips, D. (eds.). European Society for Precision Engineering and Nanotechnology, p. 465-466 2 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review