Arrayed waveguide grating in InP membrane on silicon patterned by 193-nm deep UV lithography

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Original languageEnglish
Title of host publicationProceedings of the 24th Annual Symposium of the IEEE Photonics Society Benelux Chapter
Place of PublicationAmsterdam
Publication statusPublished - 2019
Event24th Annual IEEE Photonics Benelux Symposium 2019 - VU Main building, Amsterdam, Netherlands
Duration: 21 Nov 201922 Nov 2019


Conference24th Annual IEEE Photonics Benelux Symposium 2019
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