Arrayed waveguide grating in InP membrane on silicon patterned by 193-nm deep UV lithography

Jorn P. van Engelen, Jeroen Bolk, Xuebing Zhang, Kevin A. Williams, Yuqing Jiao, Jos J.G.M. van der Tol

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationProceedings of the 24th Annual Symposium of the IEEE Photonics Society Benelux Chapter
Place of PublicationAmsterdam
Publication statusPublished - 2019
Event24th Annual Symposium of the IEEE Photonics Society Benelux - VU Main Building, Amsterdam, Netherlands
Duration: 21 Nov 201922 Nov 2019
Conference number: 24
https://www.aanmelder.nl/ieee-benelux-2019
http://photonics-benelux.org/

Conference

Conference24th Annual Symposium of the IEEE Photonics Society Benelux
Country/TerritoryNetherlands
CityAmsterdam
Period21/11/1922/11/19
Internet address

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