Arrangement, method and electrode for generating a plasma

H.W. Vries, de (Inventor), J.B. Bouwstra (Inventor), E. Aldea (Inventor), M.C.M. Sanden, van de (Inventor)

Research output: PatentPatent publication

Abstract

The present invention provides an arrangement and method for generating a uniform and stable plasma. The arrangement comprises a discharge space (7) between at least a pair of electrodes (1, 2), which electrodes (1, 2) are arranged for providing an electric field and for generating a plasma in the electric field. At least one of the electrodes (1) has a boundary surface (6) with the discharge space (7). The boundary surface is comprised of one or more alternately arranged conductive (4) and insulating regions (5). The invention further relates to an electrode (1) for use in the arrangement described. The invention may, for example, be used in dielectric barrier discharge configurations, or in arrangements for generating plasmas at atmospheric pressures, or for generating plasmas at low temperatures, such as generating atmospheric pressure glow plasmas (APG) for material processing or surface (3) treatment purposes.
Original languageEnglish
Patent numberEP1507281
Publication statusPublished - 16 Feb 2005

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