In bio-medical technology, plasmas have recently been acknowledged as a viable instrument for performing micro-surgery. This in-vivo application obviously demands strict compatibility with the human tissue which is to be treated. That in turn imposes strict requirements on the pressure (1 atmosphere) and gas temperature (37 C) in which the plasma operates. In addition, the plasma source must be compact and reliable, while the plasma species should not poison the body fluids with which they are in contact.
In this contribution we will discuss the plasma-physical and electrical properties of an RF-operated argon micro-cell plasma (MCP) configuration which is believed to be able to meet these design restrictions. Results of a numerical study with the help of the two-dimensional Relaxation ConTinuum (RCT) model [1-2] will be presented. We shall focus on the spatial variation of the feed gas temperature for various plasma operating conditions. Special attention will be paid to the volumetric and surface heating mechanisms.
 T. Makabe, N. Nakano and Y. Yamaguchi, Phys. Rev. A (45), 2520 (1992)
 T. Makabe, "Advances in Low Temperature RF Plasmas" Elsevier, (2002)
|Title of host publication||Proceedings of the 56th Annual Gaseous Electronics Conference 2003 (GEC 2003), 21-24 October, 2003, San Francisco, USA|
|Place of Publication||San Francisco, United Stated|
|Publisher||American Physical Society|
|Publication status||Published - 2003|
|Event||56th Annual Gaseous Electronics Conference (GEC 2003), October 21-24, 2003, San Francisco, CA, USA - San Francisco, CA, United States|
Duration: 21 Oct 2003 → 24 Oct 2003
|Name||Bulletin of the American Physical Society|
|Conference||56th Annual Gaseous Electronics Conference (GEC 2003), October 21-24, 2003, San Francisco, CA, USA|
|Abbreviated title||GEC 2003|
|City||San Francisco, CA|
|Period||21/10/03 → 24/10/03|