Argon ion velocity distribution in an ICP reactor

N. Sadeghi, M. Grift, van de, D. Vender, G.M.W. Kroesen, F.J. Hoog, de

Research output: Book/ReportReportAcademic

Original languageEnglish
Place of PublicationEindhoven
PublisherElementary Processes in Gas Discharges (TN EPG)
Publication statusPublished - 1996

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