| Original language | English |
|---|---|
| Place of Publication | Eindhoven |
| Publisher | Technische Universiteit Eindhoven |
| Publication status | Published - 1996 |
Argon ion velocity distribution in an ICP reactor
N. Sadeghi, M. Grift, van de, D. Vender, G.M.W. Kroesen, F.J. Hoog, de
Research output: Book/Report › Report › Academic