ArF scanner lithography for InP photonic integrated circuit fabrication

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Williams, Kevin A., Promotor Ambrosius, Huub P.M.M., Copromotor
Award date	12 May 2020
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-5002-9
Publication status	Published - 12 May 2020

Proefschrift.

Access to Document

@phdthesis{58b4bb434a294267bfbfc583a2ccffa8,

title = "ArF scanner lithography for InP photonic integrated circuit fabrication",

author = "Jeroen Bolk",

note = "Proefschrift. ",

year = "2020",

month = may,

day = "12",

language = "English",

isbn = "978-90-386-5002-9",

publisher = "Technische Universiteit Eindhoven",

school = "Applied Physics and Science Education",

}