ArF scanner lithography for InP photonic integrated circuit fabrication

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • Williams, Kevin A., Promotor
  • Ambrosius, Huub P.M.M., Copromotor
Award date12 May 2020
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-5002-9
Publication statusPublished - 12 May 2020

Bibliographical note

Proefschrift.

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