Area-selective atomic layer deposition using small molecule inhibitors

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kessels, W.M.M. (Erwin), Promotor Mackus, Adrie J.M., Copromotor Sandoval, Tania E., Copromotor, External person
Award date	22 Feb 2022
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Print ISBNs	978-90-386-5447-8
Publication status	Published - 22 Feb 2022

Proefschrift. - Embargo 1 year. - pdf open access 22-2-2023.

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@phdthesis{db6cb7840eb249f89e4298a99b956962,

title = "Area-selective atomic layer deposition using small molecule inhibitors",

author = "Merkx, {Marc Jacobus Maria}",

note = "Proefschrift. - Embargo 1 year. - pdf open access 22-2-2023.",

year = "2022",

month = feb,

day = "22",

language = "English",

isbn = "978-90-386-5447-8",

publisher = "Eindhoven University of Technology",

school = "Applied Physics and Science Education",

}