Area-selective atomic layer deposition using small molecule inhibitors

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics and Science Education
Supervisors/Advisors
  • Kessels, W.M.M. (Erwin), Promotor
  • Mackus, Adrie J.M., Copromotor
  • Sandoval, Tania E., Copromotor, External person
Award date22 Feb 2022
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-5447-8
Publication statusPublished - 22 Feb 2022

Bibliographical note

Proefschrift. - Embargo 1 year. - pdf open access 22-2-2023.

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