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Area-Selective Atomic Layer Deposition of TiN Using Aromatic Inhibitor Molecules for Metal/Dielectric Selectivity
Marc J.M. Merkx, Sander Vlaanderen, Tahsin Faraz, Marcel A. Verheijen, Wilhelmus M.M. Kessels, Adriaan J.M. MacKus (Corresponding author)
Research output: Contribution to journal › Article › Academic › peer-review
2
Citations
(Scopus)