Applications and opportunities for plasma-assisted atomic layer deposition

Research output: Contribution to conferenceOther

Abstract

Abstract only.
Original languageEnglish
Number of pages1
Publication statusPublished - 2007
EventIMEC, February 1, 2007, Leuven, Belgium -
Duration: 1 Feb 20071 Feb 2007

Conference

ConferenceIMEC, February 1, 2007, Leuven, Belgium
Period1/02/071/02/07
OtherIMEC

    Fingerprint

Cite this