Application of laser-cooling to achieve an ultra-cold ion beam for FIB

S.H.W. Wouters, B. Janssen, G. Haaf, ten, S.B. Geer, van der, P.H.A. Mutsaers, O.J. Luiten, E.J.D. Vredenbregt

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Abstract

A new type of ultra-cold ion source is under development which employs transverse laser cooling and compression of a thermal atomic rubidium beam followed by photo-ionization. The resulting ultra-cold plasma is focused to a nanometer-sized spot using an existing Focused Ion Beam column and this spot can be used for the fabrication of nano-structures. Simulations of a 10 cm long laser-cooling stage and of disorder-induced heating of the resulting ion beam, predict an achievable brightness for87Rb+ of order 107 A/m2 sr eV at an longitudinal energy spread of less than 1 eV and a current of tens of pA, which is substantially better than conventional ion sources. Experimental realization of the compact ion source has recently started with the development of an efficient high-flux atom source and a 2D laser cooler. Progress on these items will be reported.
Original languageEnglish
PagesO9
Number of pages1
Publication statusPublished - 2013
Event25th NNV Symposium on Plasma Physics and Radiation Technology, March 5-6, 2013, Lunteren, The Netherlands - De Werelt, Lunteren, Netherlands
Duration: 5 Mar 20136 Mar 2013
http://www.plasmalunteren.nl/download/2013/25th_symposium_lunteren_book_v19feb1340.pdf

Conference

Conference25th NNV Symposium on Plasma Physics and Radiation Technology, March 5-6, 2013, Lunteren, The Netherlands
CountryNetherlands
CityLunteren
Period5/03/136/03/13
Internet address

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