Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition

Z. Qing; M.C.M. Sanden, van de; D.K. Otorbaev; M.J. Graaf, de; G.J. Meeusen; A.J.M. Buuron; D.C. Schram

Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition

Z. Qing, M.C.M. Sanden, van de, D.K. Otorbaev, M.J. Graaf, de, G.J. Meeusen, A.J.M. Buuron, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

36 Downloads (Pure)

Original language	English
Title of host publication	ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4
Editors	J.E. Harry
Place of Publication	s.l.
Publisher	International Union of Pure and Applied Chemistry
Pages	1374-1379
Publication status	Published - 1993

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590831Final published version, 293 KB

Cite this

Qing, Z., Sanden, van de, M. C. M., Otorbaev, D. K., Graaf, de, M. J., Meeusen, G. J., Buuron, A. J. M., & Schram, D. C. (1993). Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition. In J. E. Harry (Ed.), ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4 (pp. 1374-1379). International Union of Pure and Applied Chemistry.

@inproceedings{a7f8a13ff4bd4042a917219503104917,

title = "Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition",

author = "Z. Qing and {Sanden, van de}, M.C.M. and D.K. Otorbaev and {Graaf, de}, M.J. and G.J. Meeusen and A.J.M. Buuron and D.C. Schram",

year = "1993",

language = "English",

pages = "1374--1379",

editor = "J.E. Harry",

booktitle = "ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4",

publisher = "International Union of Pure and Applied Chemistry",

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Qing, Z, Sanden, van de, MCM, Otorbaev, DK, Graaf, de, MJ, Meeusen, GJ, Buuron, AJM & Schram, DC 1993, Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition. in JE Harry (ed.), ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4 . International Union of Pure and Applied Chemistry, s.l., pp. 1374-1379.

Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition. / Qing, Z.; Sanden, van de, M.C.M.; Otorbaev, D.K. et al.

ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4 . ed. / J.E. Harry. s.l. : International Union of Pure and Applied Chemistry, 1993. p. 1374-1379.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition

AU - Qing, Z.

AU - Sanden, van de, M.C.M.

AU - Otorbaev, D.K.

AU - Graaf, de, M.J.

AU - Meeusen, G.J.

AU - Buuron, A.J.M.

AU - Schram, D.C.

PY - 1993

Y1 - 1993

M3 - Conference contribution

SP - 1374

EP - 1379

BT - ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4

A2 - Harry, J.E.

PB - International Union of Pure and Applied Chemistry

CY - s.l.

ER -

Qing Z, Sanden, van de MCM, Otorbaev DK, Graaf, de MJ, Meeusen GJ, Buuron AJM et al. Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition. In Harry JE, editor, ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4 . s.l.: International Union of Pure and Applied Chemistry. 1993. p. 1374-1379