Application of Langmuir probe diagnostic in cascade arc plasma enhanced deposition

Z. Qing, M.C.M. Sanden, van de, D.K. Otorbaev, M.J. Graaf, de, G.J. Meeusen, A.J.M. Buuron, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

32 Downloads (Pure)
Original languageEnglish
Title of host publicationISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 4
EditorsJ.E. Harry
Place of Publications.l.
PublisherInternational Union of Pure and Applied Chemistry
Pages1374-1379
Publication statusPublished - 1993

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