Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs

S.A. Starostin, E. Aldea, H.W. Vries, de, M. Creatore, M.C.M. Sanden, van de

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Abstract

Silica-like films were deposited on PEN and PET polymeric foils in atmospheric pressure glow discharge (APGD) in a roll-to-roll reactor open to ambient air. APGD was ignited in a mixture of inexpensive carrying gas argon and nitrogen with oxygen and hexamethyldisiloxane (HMDSO) precursor. The uniform diffuse glow in various gas mixtures was sustained by utilizing electronic stabilization network. APGD operation in air for a present setup was demonstrated. The contribution of different deposition mechanisms to the resulting silica-like film is discussed. The dependence of film structure and chemical composition on the conditions during deposition process was studied by means of SEM, ATR-FTIR and XPS analysis. The influence of oxidant concentration on the deposited film properties is analyzed and discussed.
Original languageEnglish
Title of host publicationProceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic
EditorsF.J. Gordillo-Vazquez, R.M. Pick, P. Helfenstein, J. Schmidt, M. Simek, S. Pekarek, V. Prukner
Place of PublicationBristol, United Kingdom
PublisherInstitute of Physics
Pages2P13-35-749/752
Publication statusPublished - 2007

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Starostin, S. A., Aldea, E., Vries, de, H. W., Creatore, M., & Sanden, van de, M. C. M. (2007). Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs. In F. J. Gordillo-Vazquez, R. M. Pick, P. Helfenstein, J. Schmidt, M. Simek, S. Pekarek, & V. Prukner (Eds.), Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic (pp. 2P13-35-749/752). Bristol, United Kingdom: Institute of Physics.