Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs

S.A. Starostin; E. Aldea; H.W. Vries, de; M. Creatore; M.C.M. Sanden, van de

Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs

S.A. Starostin, E. Aldea, H.W. Vries, de, M. Creatore, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Silica-like films were deposited on PEN and PET polymeric foils in atmospheric pressure glow discharge (APGD) in a roll-to-roll reactor open to ambient air. APGD was ignited in a mixture of inexpensive carrying gas argon and nitrogen with oxygen and hexamethyldisiloxane (HMDSO) precursor. The uniform diffuse glow in various gas mixtures was sustained by utilizing electronic stabilization network. APGD operation in air for a present setup was demonstrated. The contribution of different deposition mechanisms to the resulting silica-like film is discussed. The dependence of film structure and chemical composition on the conditions during deposition process was studied by means of SEM, ATR-FTIR and XPS analysis. The influence of oxidant concentration on the deposited film properties is analyzed and discussed.

Original language	English
Title of host publication	Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic
Editors	F.J. Gordillo-Vazquez, R.M. Pick, P. Helfenstein, J. Schmidt, M. Simek, S. Pekarek, V. Prukner
Place of Publication	Bristol, United Kingdom
Publisher	Institute of Physics
Pages	2P13-35-749/752
Publication status	Published - 2007

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Starostin, S. A., Aldea, E., Vries, de, H. W., Creatore, M., & Sanden, van de, M. C. M. (2007). Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs. In F. J. Gordillo-Vazquez, R. M. Pick, P. Helfenstein, J. Schmidt, M. Simek, S. Pekarek, & V. Prukner (Eds.), Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic (pp. 2P13-35-749/752). Institute of Physics.

Starostin, S.A. ; Aldea, E. ; Vries, de, H.W. et al. / Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs. Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. editor / F.J. Gordillo-Vazquez ; R.M. Pick ; P. Helfenstein ; J. Schmidt ; M. Simek ; S. Pekarek ; V. Prukner. Bristol, United Kingdom : Institute of Physics, 2007. pp. 2P13-35-749/752

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title = "Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs",

abstract = "Silica-like films were deposited on PEN and PET polymeric foils in atmospheric pressure glow discharge (APGD) in a roll-to-roll reactor open to ambient air. APGD was ignited in a mixture of inexpensive carrying gas argon and nitrogen with oxygen and hexamethyldisiloxane (HMDSO) precursor. The uniform diffuse glow in various gas mixtures was sustained by utilizing electronic stabilization network. APGD operation in air for a present setup was demonstrated. The contribution of different deposition mechanisms to the resulting silica-like film is discussed. The dependence of film structure and chemical composition on the conditions during deposition process was studied by means of SEM, ATR-FTIR and XPS analysis. The influence of oxidant concentration on the deposited film properties is analyzed and discussed.",

author = "S.A. Starostin and E. Aldea and {Vries, de}, H.W. and M. Creatore and {Sanden, van de}, M.C.M.",

year = "2007",

language = "English",

pages = "2P13--35--749/752",

editor = "F.J. Gordillo-Vazquez and R.M. Pick and P. Helfenstein and J. Schmidt and M. Simek and S. Pekarek and V. Prukner",

booktitle = "Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic",

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}

Starostin, SA, Aldea, E, Vries, de, HW, Creatore, M & Sanden, van de, MCM 2007, Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs. in FJ Gordillo-Vazquez, RM Pick, P Helfenstein, J Schmidt, M Simek, S Pekarek & V Prukner (eds), Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Institute of Physics, Bristol, United Kingdom, pp. 2P13-35-749/752.

Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs. / Starostin, S.A.; Aldea, E.; Vries, de, H.W. et al.
Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. ed. / F.J. Gordillo-Vazquez; R.M. Pick; P. Helfenstein; J. Schmidt; M. Simek; S. Pekarek; V. Prukner. Bristol, United Kingdom: Institute of Physics, 2007. p. 2P13-35-749/752.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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T1 - Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs

AU - Starostin, S.A.

AU - Aldea, E.

AU - Vries, de, H.W.

AU - Creatore, M.

AU - Sanden, van de, M.C.M.

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N2 - Silica-like films were deposited on PEN and PET polymeric foils in atmospheric pressure glow discharge (APGD) in a roll-to-roll reactor open to ambient air. APGD was ignited in a mixture of inexpensive carrying gas argon and nitrogen with oxygen and hexamethyldisiloxane (HMDSO) precursor. The uniform diffuse glow in various gas mixtures was sustained by utilizing electronic stabilization network. APGD operation in air for a present setup was demonstrated. The contribution of different deposition mechanisms to the resulting silica-like film is discussed. The dependence of film structure and chemical composition on the conditions during deposition process was studied by means of SEM, ATR-FTIR and XPS analysis. The influence of oxidant concentration on the deposited film properties is analyzed and discussed.

AB - Silica-like films were deposited on PEN and PET polymeric foils in atmospheric pressure glow discharge (APGD) in a roll-to-roll reactor open to ambient air. APGD was ignited in a mixture of inexpensive carrying gas argon and nitrogen with oxygen and hexamethyldisiloxane (HMDSO) precursor. The uniform diffuse glow in various gas mixtures was sustained by utilizing electronic stabilization network. APGD operation in air for a present setup was demonstrated. The contribution of different deposition mechanisms to the resulting silica-like film is discussed. The dependence of film structure and chemical composition on the conditions during deposition process was studied by means of SEM, ATR-FTIR and XPS analysis. The influence of oxidant concentration on the deposited film properties is analyzed and discussed.

M3 - Conference contribution

SP - 2P13-35-749/752

BT - Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic

A2 - Gordillo-Vazquez, F.J.

A2 - Pick, R.M.

A2 - Helfenstein, P.

A2 - Schmidt, J.

A2 - Simek, M.

A2 - Pekarek, S.

A2 - Prukner, V.

PB - Institute of Physics

CY - Bristol, United Kingdom

ER -

Starostin SA, Aldea E, Vries, de HW, Creatore M , Sanden, van de MCM. Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs. In Gordillo-Vazquez FJ, Pick RM, Helfenstein P, Schmidt J, Simek M, Pekarek S, Prukner V, editors, Proceedings of the 28th International Conference on Phenomena in Ionised Gases (ICPIG 2007) 15-20 July 2007, Prague, Czech Republic. Bristol, United Kingdom: Institute of Physics. 2007. p. 2P13-35-749/752

Application of atmospheric pressure glow discharge (APGD) for deposition of thin silica like films on polymeric webs

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