Apparatus suitable for plasma surface treating and process for preparing membrane layers

H.J.A. Schuurmans (Inventor), J. Werner (Inventor), D.C. Schram (Inventor), G.M.W. Kroesen (Inventor), Shell International Research (NL) (Inventor)

Research output: PatentPatent publication

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Abstract

The invention relates to an apparatus suitable for plasma surface treating (e.g. forming a membrane layer on a substrate) which comprises a plasma generation section (2) which is in communication via at least one plasma inlet means (4) (e.g. a nozzle) with an enclosed plasma treating section (3) which is operable at a lower pressure than the plasma generation section (2), and wherein the plasma treating-section (3) is in communication with inlet means (10) for a fluid (e.g. polymerizable) reactant. The invention furthermore relates to a process for preparing membrane layers employing such an apparatus.
Original languageEnglish
Publication statusPublished - 1988

Bibliographical note

Patent EP0295752 (B1) 1988-12-21 ; US5120568 1992-06-09 ; AU597832 1990-06-07 ; AU1764988 1988-12-22 ; DE386716D 1992-03-05 ; GB8713986 1987-07-22 ; JP1100265 1989-04-18

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