Apparatus for plasma surface treating and preparation of membrane layers

H.J.A. Schuurmans (Inventor), J. Werner (Inventor), D.C. Schram (Inventor), G.M.W. Kroesen (Inventor), Shell Oil Co (US) (Inventor)

Research output: PatentPatent publication

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Abstract

An apparatus suitable for plasma surface treating (e.g., forming a membrane layer on a substrate surface) comprises a plasma generation section which is operable at least at substantially atmospheric pressure and is in communication via at least one plasma inlet (e.g., a nozzle) with an enclosed plasma treating section which is operable at a lower pressure than the plasma generation section, and wherein the plasma treating-section is in communication with an inlet for a fluid (e.g., polymerizable) reactant used to form a layer on the substrate surface.
Original languageEnglish
Publication statusPublished - 1990

Bibliographical note

Patent US4957062 1990-09-18

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