Apparatus and method for reactive ion etching

F. Roozeboom (Inventor), A.M. Lankhorst (Inventor), P.W.G. Poodt (Inventor), N.B. Koster (Inventor), G.J.J. Winands (Inventor), A.J.P.M. Vermeer (Inventor)

Research output: PatentPatent publication

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Physics & Astronomy