Abstract
A method to avoid the stiction failure in nano-electro-opto-mechanical systems has been demonstrated by coating the system with an anti-stiction layer of Al2O3 grown by atomic layer deposition techniques. The device based on a double-membrane photonic crystal cavity can be reversibly operated from the pull-in back to its release status. This enables to electrically switch the wavelength of a mode over ~50 nm with a potential modulation frequency above 2 MHz. These results pave the way to reliable nano-mechanical sensors and optical switches.
| Original language | English |
|---|---|
| Pages (from-to) | 3882-3891 |
| Number of pages | 10 |
| Journal | Optics Express |
| Volume | 26 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 19 Feb 2018 |
Funding
Dutch Technology Foundation STW; Netherlands Organization for Scientific Research (NWO) Applied Science Division; Technology Program of the Ministry of Economic Affairs (10380 and 12662); The Dutch Ministry of Education, Culture and Science under Gravity Program “Research Centre for Integrated Nanophotonics”; Research Program’Nanoscale quantum optics’ of the Foundation for Fundamental Research on Matter (FOM). The nanofabrication used in this work has been performed in the NanoLab@TU/e cleanroom. We acknowledge stimulating discussions with Dr. H.C.M. Knoops.