Abstract
We have investigated the structural properties of as-grown and annealed (750 and 800 degrees C) digital alloy InGaAlAs ( lambda =1.3 mu m) laser structures by cross-sectional scanning-tunneling microscopy. We show that it is possible to resolve the digital alloy period in the as-grown sample and the 750 degrees C annealed sample. The 800 degrees C annealed sample did not show the digital alloy period because of intermixing of the digital alloy. The 750 degrees C annealed sample showed only slight intermixing. The barrier/well interface roughness for the as-grown and the 750 degrees C annealed samples was the same. Annealing at 800 degrees C showed large barrier/well interface roughness and lateral composition modulation due to the phase separation of InGaAs/InAlAs alloys
Original language | English |
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Pages (from-to) | 1191-1193 |
Journal | Applied Physics Letters |
Volume | 82 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2003 |