Analysis of tindioxide coatings by multiple angle of incidence ellipsometry

H. Haitjema; G.F. Woerlee

doi:10.1016/S0040-6090(89)80002-1

Analysis of tindioxide coatings by multiple angle of incidence ellipsometry

H. Haitjema, G.F. Woerlee

Mechanical Engineering

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Abstract

Pyrolytically sprayed tin dioxide coatings were analysed by multiple angle of incidence ellipsometry. Methods are developed which can determine non-ideal film parameters such as surface roughness, anisotropy and inhomogeneity. It is shown that tin dioxide coatings behave as transparent films with an apparent surface roughness at a wavelength of 632.8 nm. At a wavelength of 1523 nm the films become absorbing as a result of free electron plasma behaviour. At this wavelength anisotropy and inhomogeneity of the complex refractive index, which can be related to different electrical properties in different sublayers and directions, can be determined with an accuracy which is limited by the strong correlations between the parameters when many parameters are determined

Original language	English
Pages (from-to)	1-16
Journal	Thin Solid Films
Volume	169
Issue number	1
DOIs	https://doi.org/10.1016/S0040-6090(89)80002-1
Publication status	Published - 1989

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title = "Analysis of tindioxide coatings by multiple angle of incidence ellipsometry",

abstract = "Pyrolytically sprayed tin dioxide coatings were analysed by multiple angle of incidence ellipsometry. Methods are developed which can determine non-ideal film parameters such as surface roughness, anisotropy and inhomogeneity. It is shown that tin dioxide coatings behave as transparent films with an apparent surface roughness at a wavelength of 632.8 nm. At a wavelength of 1523 nm the films become absorbing as a result of free electron plasma behaviour. At this wavelength anisotropy and inhomogeneity of the complex refractive index, which can be related to different electrical properties in different sublayers and directions, can be determined with an accuracy which is limited by the strong correlations between the parameters when many parameters are determined",

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AB - Pyrolytically sprayed tin dioxide coatings were analysed by multiple angle of incidence ellipsometry. Methods are developed which can determine non-ideal film parameters such as surface roughness, anisotropy and inhomogeneity. It is shown that tin dioxide coatings behave as transparent films with an apparent surface roughness at a wavelength of 632.8 nm. At a wavelength of 1523 nm the films become absorbing as a result of free electron plasma behaviour. At this wavelength anisotropy and inhomogeneity of the complex refractive index, which can be related to different electrical properties in different sublayers and directions, can be determined with an accuracy which is limited by the strong correlations between the parameters when many parameters are determined

U2 - 10.1016/S0040-6090(89)80002-1

DO - 10.1016/S0040-6090(89)80002-1

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JO - Thin Solid Films

JF - Thin Solid Films

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Analysis of tindioxide coatings by multiple angle of incidence ellipsometry

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