Analysis of tindioxide coatings by multiple angle of incidence ellipsometry

H. Haitjema, G.F. Woerlee

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)
1 Downloads (Pure)


Pyrolytically sprayed tin dioxide coatings were analysed by multiple angle of incidence ellipsometry. Methods are developed which can determine non-ideal film parameters such as surface roughness, anisotropy and inhomogeneity. It is shown that tin dioxide coatings behave as transparent films with an apparent surface roughness at a wavelength of 632.8 nm. At a wavelength of 1523 nm the films become absorbing as a result of free electron plasma behaviour. At this wavelength anisotropy and inhomogeneity of the complex refractive index, which can be related to different electrical properties in different sublayers and directions, can be determined with an accuracy which is limited by the strong correlations between the parameters when many parameters are determined
Original languageEnglish
Pages (from-to)1-16
JournalThin Solid Films
Issue number1
Publication statusPublished - 1989


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