Abstract
Thickness and complex refractive index of each layer in a double hetero structure, consisting of InP and InGaAsP, are obtained by spectroscopic ellipsometry. Accuracy is at least 2% in layer thickness and 0.005 in the refractive index of InP. An equation description of the complex refractive index allows for flexible description of InP-based materials in the wavelength range of 800–1700 nm. Simultaneous determination of thickness and refractive index by non-destructive ellipsometry in the near infra red (NIR) for the layers in a double hetero layer stack requires additional information on the properties of these layers
Original language | English |
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Pages (from-to) | 165-170 |
Number of pages | 6 |
Journal | Thin Solid Films |
Volume | 364 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 2000 |