An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners

Marcel Heertjes; Sebastiaan van den Eijnden; Bardia Sharif

doi:10.1109/ICM54990.2023.10102062

An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners

Marcel Heertjes, Sebastiaan van den Eijnden, Bardia Sharif

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

10 Downloads (Pure)

Abstract

Hybrid integrator-gain systems (HIGS) are non- linear control elements that switch between simple integrator dynamics and gain characteristics. Switching is done in a way that guarantees sign-equivalence of the integrator's input-output pair, thereby enabling phase advantages over linear integrators as seen through describing function analysis. This paper provides an overview of the state of the art in HIGS controlled systems analysis and design with applications to wafer scanners.

Original language	English
Title of host publication	Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023
Publisher	Institute of Electrical and Electronics Engineers
Number of pages	8
ISBN (Electronic)	978-1-6654-6661-5
DOIs	https://doi.org/10.1109/ICM54990.2023.10102062
Publication status	Published - 2023
Event	2023 IEEE International Conference on Mechatronics, ICM 2023 - Loughborough, United Kingdom Duration: 15 Mar 2023 → 17 Mar 2023

Conference

Conference	2023 IEEE International Conference on Mechatronics, ICM 2023
Abbreviated title	ICM 2023
Country/Territory	United Kingdom
City	Loughborough
Period	15/03/23 → 17/03/23

Keywords

hybrid integrator-gain systems
motion systems
nonlinear PID-control
reset control

Access to Document

10.1109/ICM54990.2023.10102062

Cite this

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title = "An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners",

abstract = "Hybrid integrator-gain systems (HIGS) are non- linear control elements that switch between simple integrator dynamics and gain characteristics. Switching is done in a way that guarantees sign-equivalence of the integrator's input-output pair, thereby enabling phase advantages over linear integrators as seen through describing function analysis. This paper provides an overview of the state of the art in HIGS controlled systems analysis and design with applications to wafer scanners.",

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author = "Marcel Heertjes and {van den Eijnden}, Sebastiaan and Bardia Sharif",

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doi = "10.1109/ICM54990.2023.10102062",

language = "English",

booktitle = "Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023",

publisher = "Institute of Electrical and Electronics Engineers",

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note = "2023 IEEE International Conference on Mechatronics, ICM 2023, ICM 2023 ; Conference date: 15-03-2023 Through 17-03-2023",

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Heertjes, M , van den Eijnden, S & Sharif, B 2023, An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners. in Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023., 10102062, Institute of Electrical and Electronics Engineers, 2023 IEEE International Conference on Mechatronics, ICM 2023, Loughborough, United Kingdom, 15/03/23. https://doi.org/10.1109/ICM54990.2023.10102062

An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners. / Heertjes, Marcel ; van den Eijnden, Sebastiaan ; Sharif, Bardia.
Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023. Institute of Electrical and Electronics Engineers, 2023. 10102062.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - Hybrid integrator-gain systems (HIGS) are non- linear control elements that switch between simple integrator dynamics and gain characteristics. Switching is done in a way that guarantees sign-equivalence of the integrator's input-output pair, thereby enabling phase advantages over linear integrators as seen through describing function analysis. This paper provides an overview of the state of the art in HIGS controlled systems analysis and design with applications to wafer scanners.

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BT - Proceedings - 2023 IEEE International Conference on Mechatronics, ICM 2023

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ER -

An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners

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