An expanding thermal plasma for deposition of a-Si:H

R.J. Severens, G.J.H. Brussaard, H.J.M. Verhoeven, M.C.M. Van de Sanden, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

12 Citations (Scopus)
63 Downloads (Pure)

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Physics & Astronomy