An efficient lateral channel profiling of poly-SiGe-gated PMOSFET's for 0.1 μm CMOS low-voltage applications

Y. V. Ponomarev, P. A. Stolk, A. C.M.C. van Brandenburg, C. J.J. Dachs, M. Kaiser, A. H. Montree, R. Roes, J. Schmitz, P. H. Woerlee

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

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Engineering & Materials Science