An active spectroscopical study on the plasma parameters of an ICP

Various techniques to measure the electron density and temperature of a 100 MHz inductively coupled plasma (ICP) are compared with each other. Apart from passive spectroscopy of measuring the shape of (e.g. H) and the area under emission lines we explored the field of active spectroscopy. Non-intrusive and specific are the methods of diode laser absorption (DLA) of an argon 4s-4p transition and Thomson scattering (TS). Intrusive and global is the power interruption (PI) technique: the response of line (argon and analytes) and continuum emission is followed during PI. Finally, a combination of two active techniques, namely TS during PI, is studied. By using the different techniques on the same plasma condition (frequency, power and flows) this intercomparison will reveal the validity region of the various techniques. In this way a strong basis will be created for understanding