Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates

A. Graaf, de, J.L. Longueville, M.C.M. Sanden, van de, D.C. Schram, E.H.A. Dekempeneer

Research output: Contribution to conferenceAbstractPopular

Original languageEnglish
Pages4
Publication statusPublished - 1997
EventAmerican Vacuum Society : 44th national symposium, San Jose
- San Jose, United States
Duration: 20 Oct 199724 Oct 1997
Conference number: 44

Conference

ConferenceAmerican Vacuum Society : 44th national symposium, San Jose
Abbreviated titleAVS
Country/TerritoryUnited States
CitySan Jose
Period20/10/9724/10/97

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