Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates

A. Graaf, de, J.L. Longueville, M.C.M. Sanden, van de, D.C. Schram, E.H.A. Dekempeneer

Research output: Contribution to conferenceAbstractPopular

Original languageEnglish
Pages4
Publication statusPublished - 1997
EventAmerican Vacuum Society : 44th national symposium, San Jose
- San Jose, United States
Duration: 20 Oct 199724 Oct 1997
Conference number: 44

Conference

ConferenceAmerican Vacuum Society : 44th national symposium, San Jose
Abbreviated titleAVS
CountryUnited States
CitySan Jose
Period20/10/9724/10/97

Cite this

Graaf, de, A., Longueville, J. L., Sanden, van de, M. C. M., Schram, D. C., & Dekempeneer, E. H. A. (1997). Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates. 4. Abstract from American Vacuum Society : 44th national symposium, San Jose
, San Jose, United States.