Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates

A. Graaf, de, J.L. Longueville, M.C.M. Sanden, van de, D.C. Schram, E.H.A. Dekempeneer

Research output: Contribution to conferenceAbstractPopular

Original languageEnglish
Pages4
Publication statusPublished - 1997
EventAmerican Vacuum Society : 44th national symposium, San Jose
- San Jose, United States
Duration: 20 Oct 199724 Oct 1997
Conference number: 44

Conference

ConferenceAmerican Vacuum Society : 44th national symposium, San Jose
Abbreviated titleAVS
CountryUnited States
CitySan Jose
Period20/10/9724/10/97

Cite this

Graaf, de, A., Longueville, J. L., Sanden, van de, M. C. M., Schram, D. C., & Dekempeneer, E. H. A. (1997). Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates. 4. Abstract from American Vacuum Society : 44th national symposium, San Jose
, San Jose, United States.
Graaf, de, A. ; Longueville, J.L. ; Sanden, van de, M.C.M. ; Schram, D.C. ; Dekempeneer, E.H.A. / Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates. Abstract from American Vacuum Society : 44th national symposium, San Jose
, San Jose, United States.
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title = "Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates",
author = "{Graaf, de}, A. and J.L. Longueville and {Sanden, van de}, M.C.M. and D.C. Schram and E.H.A. Dekempeneer",
note = "Abstract; American Vacuum Society : 44th national symposium, San Jose<br/>, AVS ; Conference date: 20-10-1997 Through 24-10-1997",
year = "1997",
language = "English",
pages = "4",

}

Graaf, de, A, Longueville, JL, Sanden, van de, MCM, Schram, DC & Dekempeneer, EHA 1997, 'Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates' American Vacuum Society : 44th national symposium, San Jose
, San Jose, United States, 20/10/97 - 24/10/97, pp. 4.

Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates. / Graaf, de, A.; Longueville, J.L.; Sanden, van de, M.C.M.; Schram, D.C.; Dekempeneer, E.H.A.

1997. 4 Abstract from American Vacuum Society : 44th national symposium, San Jose
, San Jose, United States.

Research output: Contribution to conferenceAbstractPopular

TY - CONF

T1 - Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates

AU - Graaf, de, A.

AU - Longueville, J.L.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

AU - Dekempeneer, E.H.A.

N1 - Abstract

PY - 1997

Y1 - 1997

M3 - Abstract

SP - 4

ER -

Graaf, de A, Longueville JL, Sanden, van de MCM, Schram DC, Dekempeneer EHA. Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates. 1997. Abstract from American Vacuum Society : 44th national symposium, San Jose
, San Jose, United States.