Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates

A. Graaf, de, J.L. Longueville, M.C.M. Sanden, van de, D.C. Schram, E.H.A. Dekempeneer

Research output: Contribution to conference › Abstract › Popular

Original language	English
Pages	4
Publication status	Published - 1997
Event	American Vacuum Society : 44th national symposium, San Jose - San Jose, United States Duration: 20 Oct 1997 → 24 Oct 1997 Conference number: 44

Conference	American Vacuum Society : 44th national symposium, San Jose
Abbreviated title	AVS
Country/Territory	United States
City	San Jose
Period	20/10/97 → 24/10/97

Cite this

@conference{d31e2eda279a4b6e90989a3c7a2d74c4,

title = "Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates",

author = "{Graaf, de}, A. and J.L. Longueville and {Sanden, van de}, M.C.M. and D.C. Schram and E.H.A. Dekempeneer",

note = "Abstract; American Vacuum Society : 44th national symposium, San Jose<br/>, AVS ; Conference date: 20-10-1997 Through 24-10-1997",

year = "1997",

language = "English",

pages = "4",

}

TY - CONF

T1 - Amorphous hydrogenated carbon nitride films deposited via an expanding thermal plasma at high growth rates

AU - Graaf, de, A.

AU - Longueville, J.L.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

AU - Dekempeneer, E.H.A.

N1 - Conference code: 44

PY - 1997

Y1 - 1997

M3 - Abstract

SP - 4

T2 - American Vacuum Society : 44th national symposium, San Jose<br/>

Y2 - 20 October 1997 through 24 October 1997

ER -